Semiconductor devices. Micro-electromechanical devices - Test method for Poisson's ratio of thin film MEMS materials Ingestion-build-84997 — selecting and specifying security

— selecting and specifying security functional requirements (SFRs) from ISO/IEC 15408-2 to protect Personally Identifiable Information (PII)

BS EN ISO 8185 also includes requirements for active HME (heat and moisture exchanger) devices

Changes have been made to the values in some Tables

5 Quality conformance inspection

commissioning and maintenance of systems in non-domestic premises

Semiconductor devices. Micro-electromechanical devices - Test method for Poisson's ratio of thin film MEMS materials Ingestion-build-84997 — selecting and specifying security1 Scope This part of IEC 62047 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin film micro electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 m.