E03400 - SEMI E34 - Safety Guideline for Mass Flow Device Removal and Shipment StdTpc-Electronic Data Interchange This Standard was technically approved

This Standard was technically approved by the Flat Panel Display – Factory Automation Global Technical Committee

本試験方法は，global Compound Semiconductor Committeeで技術的に承認されている。現版は2005年11月29日，global Audits and Reviews Subcommitteeにて発行が承認された。2006年1月にwww

and Korean

注意：　本文書は，編集上の修正を伴い，再承認された。

SEMI E88-0302 (technical revision)

E03400 - SEMI E34 - Safety Guideline for Mass Flow Device Removal and Shipment StdTpc-Electronic Data Interchange This Standard was technically approvedNOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Safety Guideline provides procedures to reduce the risk associated with removing, shipping, and receiving mass flow devices that have been exposed to hazardous materials. This Safety Guideline is intended to: Encourage