G09500 - SEMI G95 - 後工程における450mmウェーハ用テープフレームカセットのためのロードポートの機械的インタフェースの仕様 StdPbc-0225 The Test Method is applicable
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Description
The Test Method is applicable to both bulk and epitaxial silicon
and Investment Castings for Components Used in High Purity Semiconductor Manufacturing Applications
This Standard includes the measuring
test methods
The TSEM consists of equipment characteristics and behaviors that apply to this class of equipment
G09500 - SEMI G95 - 後工程における450mmウェーハ用テープフレームカセットのためのロードポートの機械的インタフェースの仕様 StdPbc-0225 The Test Method is applicableAssembly & Packaging Global Technical Committee201364global Audits and Reviews Subcommittee20136www. semiviews. org www. semi. org 450mm450TFC450TFC 450mm450TFC450TFC 450TFC PGVAGVOHT450TFC Referenced SEMI Standards SEMI G88 Specification for Tape Frame for 450 mm Wafer SEMI G92 Specification for Tape Frame Cassette for 450 mm Wafer
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