P02500 - SEMI P25 - 焦点深度および最適焦点深度（仕様） Revision:SEMI P25-94 (Reapproved 1104) - Inactive

P02500 - SEMI P25 - 焦点深度および最適焦点深度（仕様） Revision:SEMI P25-94 (Reapproved 1104) - InactiveNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Micropatterning CommitteeNorth American Microlithography Committee2004816North American Regional Standards Committee20049www. semi. org200411 1994 NOTICE: This Standard or Safety Guideline has an Inactive Status because the

2-0698 (Reapproved 0706)

Where there is not significant compensation by impurities of the opposite conductivity type

この文書では，液中パーティクルカウンタの計数効率試験の条件を定義する。

7の表1に示す帯電の最大推奨レベルを決定する方法について説明する。SEMI E129にある独自の方法，およびこのガイドとSEMI E78の推奨を整合させる更新情報の両方を含んでいる。

mounted on the jig to process semiconductor devices

To avoid any disturbance of future development and to facilitate interchangeability of diaphragm valves

3千帕(一大氣壓)以下的製程化學品鋼瓶。

SEMI F27-0997 (first published)

4  This Guide also describes the different temperature regions of an internal feeder and the temperature limits of the materials used in each region

慣例単位は参考目的のみのために括弧内に併記され，最も近い数値に丸められてきた。

This Guide provides an overview of the various elements of Tool Accommodation

this Specification intends neither to exclude nor to limit the possibility that suppliers and end-users might test with chemicals other than UPW or with other temperature conditions and