E01600 - SEMI E16 - マスフローコントローラ漏洩率の決定および記述のガイド StdVol-Automation Technology The surface characterization tests to

The surface characterization tests to be performed are specified herein

This Specification describes the volume within any process or cassette module which shall be accessible to the transport module end effector in a cluster tool

This Test Method is especially applicable for silicon where boron is an unintentional p-type contaminant at trace levels (<5 × 1014 atoms/cm3)

本标准规定了铝浆的共同特性，包括但不限于外观、颗粒度、固含量和粘度，烧结后的铝浆要求，包括但不限于附着力试验、弯曲度试验和水煮试验。

org in February 2010

E01600 - SEMI E16 - マスフローコントローラ漏洩率の決定および記述のガイド StdVol-Automation Technology The surface characterization tests toglobal Gases Committee2011513global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org1990200411 (MFCs) Referenced SEMI Standards None.