F09600 - SEMI F96 - Specification for Port Configuration of Canisters to Contain CVD Precursors StdPbc-0709 Only the ability to describe

Only the ability to describe the fact that a supplier has implemented such a concept and that a client can discover this implementation and any data it can produce is in scope for this Specification

SEMI MF1391 –– Test Method for Substitutional Atomic Carbon Content of Silicon by Infrared Absorption

SEMI MF1725 — Practice for Analysis of Crystallographic Perfection of Silicon Ingots

SEMI E47-0301 (technical revision)

This guideline was technically approved by the Global Facilities Committee and is the direct responsibility of the Japan Facilities Committee

F09600 - SEMI F96 - Specification for Port Configuration of Canisters to Contain CVD Precursors StdPbc-0709 Only the ability to describeThis specification was technically approved by the Global Gases Committee and is the direct responsibility of the North American Gases Committee. Current edition approved by the North American Regional Standards Committee on April 22, 2004. Initially available at www. semi. org June 2004; to be published July 2004. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met.