E08400 - SEMI E84 - Specification for Enhanced Carrier Handoff Parallel I/O Interface StdPbc-0816 ICP-MS is the preferred method

ICP-MS is the preferred method because it is more sensitive and efficient

The scope of this Standard is limited to defining the behavior of Metrology equipment as perceived by a SEMI Equipment Communications Standard 2 Message Content (SECS-II) host that complies with the SEMI E30 model

and materials acceptance purposes

This Standard provides specification for implementing basic equipment performance tracking (EPT) for production equipment

This Standard describes a specific device structure and behavior of a generic equipment networked sensor

E08400 - SEMI E84 - Specification for Enhanced Carrier Handoff Parallel I/O Interface StdPbc-0816 ICP-MS is the preferred methodDue to the migration to large wafer sizes, future semiconductor factories will use extensive automated material handling systems (AMHS) to transfer wafer carriers, including FOUPs and open cassettes, of increasing weight. The parallel input output (PI O) control signals between the production equipment and the AMHS must be better defined for more reliable and efficient carrier handoffs (load unload) at production equipment load ports. The purpose of