MS01000 - SEMI MS10 - Test Method to Measure Fluid Permeation Through MEMS Packaging Materials StdVol-Flat Panel Display and 100 µm (0

and 100 µm (0

an automated approach to fabrication of suitable test structures using standard tools available in modern wafer fabs

lubricants

In neither case shall the gas be considered as of higher quality than that defined by the specification

SEMI S2-1016a (delayed revision)

MS01000 - SEMI MS10 - Test Method to Measure Fluid Permeation Through MEMS Packaging Materials StdVol-Flat Panel Display and 100 µm (01 Purpose 1. 1 Microelectromechanical systems (MEMS) are miniaturized systems requiring packaging for environmental protection and for interaction with the external environment. While there is a wide range of MEMS devices, a fairly common need is for packaging that allows movement of some of the internal subcomponents of the device during operation. This is in contrast to the typical integrated circuit that requires only that the device be protected