M03800 - SEMI M38 - Specification for Polished Reclaimed Silicon Wafers Revision:SEMI M38-0312 - Superseded called the SECS Equipment Data

called the SECS Equipment Data Dictionary (SEDD)

and two classes of larger diameter test wafers (from 150 mm)

The minimum test described in this Standard is to test one MFC in five common mounting positions using Nitrogen gas at 135

SEMI M38-0307 (technical revision)

Two representative two-wafer stacks are depicted in Figure 1 and Figure 2

M03800 - SEMI M38 - Specification for Polished Reclaimed Silicon Wafers Revision:SEMI M38-0312 - Superseded called the SECS Equipment DataThis Specification divides reclaimed wafers into four application categories: Mechanical, Furnace, Particle, and Lithography and provides tables of the specification requirements for each category. Thus, a prospective purchaser of reclaimed silicon wafers needs to know which application matches his or her requirements. Only requirements for some attributes are specified in Tables 1 and 2. Other requirements are indicated to be customer specified which